Chapter 84 · Nuclear reactors, boilers, machinery and mechanical appliances; parts thereof
8486
Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories
Máy và thiết bị chỉ sử dụng hoặc chủ yếu sử dụng để sản xuất các khối bán dẫn hoặc tấm bán dẫn mỏng, linh kiện bán dẫn, mạch điện tử tích hợp hoặc màn hình dẹt; máy và thiết bị nêu ở Chú giải 11 (C) của Chương này; bộ phận và phụ kiện
71 tariff lines under 8486
Rates are set at 8-digit level. Select the line matching the goods.
| HS code | Description | Unit | Ordinary import duty | MFN | VAT |
|---|---|---|---|---|---|
| 8486.10.10 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of boules or wafers: / - - Apparatus for rapid heating of semiconductor wafers | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.10.20 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of boules or wafers: / - - Spin dryers for semiconductor wafer processing | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.10.30 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of boules or wafers: / - - Machines for working any material by removal of material, by laser or other light or photon beam in the production of semiconductor wafers | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.10.40 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of boules or wafers: / - - Machines and apparatus for sawing monocrystal semiconductor boules into slices, or wafers into chips | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.10.50 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of boules or wafers: / - - Grinding, polishing and lapping machines for processing of semiconductor wafers | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.10.60 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of boules or wafers: / - - Apparatus for growing or pulling monocrystal semiconductor boules | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.10.90 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of boules or wafers: / - - Other | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.20.11 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - Film formation equipment: / - - - Chemical vapour deposition apparatus for semiconductor production | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.20.12 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - Film formation equipment: / - - - Epitaxial deposition machines for semiconductor wafers; spinners for coating photographic emulsions on semiconductor wafers | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.20.13 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - Film formation equipment: / - - - Apparatus for physical deposition by sputtering on semiconductor wafers; physical deposition apparatus for semiconductor production | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.20.19 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - Film formation equipment: / - - - Other | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.20.21 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - Doping equipment: / - - - Ion implanters for doping semiconductor materials | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.20.29 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - Doping equipment: / - - - Other | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.20.31 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - Etching and stripping equipment: / - - - Deflash machines for cleaning and removing contaminants from the metal leads of semiconductor packages prior to the electroplating process; spraying appliances for etching, stripping or cleaning semiconductor wafers | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.20.32 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - Etching and stripping equipment: / - - - Equipment for dry etching patterns on semiconductor materials | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.20.33 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - Etching and stripping equipment: / - - - Apparatus for wet etching, developing, stripping or cleaning semiconductor wafers | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.20.39 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - Etching and stripping equipment: / - - - Other | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.20.41 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - Lithography equipment: / - - - Direct write-on-wafer apparatus | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.20.42 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - Lithography equipment: / - - - Step and repeat aligners | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.20.49 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - Lithography equipment: / - - - Other | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.20.51 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - Equipment for developing exposed wafers: / - - - Dicing machines for scribing or scoring semiconductor wafers | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.20.59 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - Equipment for developing exposed wafers: / - - - Other | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.20.91 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - Other: / - - - Lasercutters for cutting contacting tracks in semiconductor production by laser beam | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.20.92 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - Other: / - - - Machines for bending, folding and straightening semiconductor leads | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.20.93 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - Other: / - - - Resistance heated furnaces and ovens for the manufacture of semiconductor devices on semiconductor wafers | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.20.94 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - Other: / - - - Inductance or dielectric furnaces and ovens for the manufacture of semiconductor devices on semiconductor wafers | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.20.95 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - Other: / - - - Automated machines for the placement or the removal of components or contact elements on semiconductor materials | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.20.99 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - Other: / - - - Other | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.30.10 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of flat panel displays: / - - Apparatus for dry etching patterns on flat panel display substrates | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.30.20 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of flat panel displays: / - - Apparatus for wet etching, developing, stripping or cleaning flat panel displays | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.30.30 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of flat panel displays: / - - Chemical vapour deposition apparatus for flat panel display production; spinners for coating photosensitive emulsions on flat panel display substrates; apparatus for physical deposition on flat panel display substrates | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.30.90 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus for the manufacture of flat panel displays: / - - Other | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.40.10 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus specified in Note 11 (C) to this Chapter: / - - Focused ion beam milling machines to produce or repair masks and reticles for patterns on semiconductor devices | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.40.20 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus specified in Note 11 (C) to this Chapter: / - - Die attach apparatus, tape automated bonders, wire bonders and encapsulation equipment for the assembly of semiconductors; automated machines for transport, handling and storage of semiconductor wafers, wafer cassettes, wafer boxes and other materials for semiconductor devices | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.40.30 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus specified in Note 11 (C) to this Chapter: / - - Moulds for manufacture of semiconductor devices | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.40.40 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus specified in Note 11 (C) to this Chapter: / - - Optical stereoscopic microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.40.50 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus specified in Note 11 (C) to this Chapter: / - - Photomicrographic microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.40.60 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus specified in Note 11 (C) to this Chapter: / - - Electron beam microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.40.70 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus specified in Note 11 (C) to this Chapter: / - - Pattern generating apparatus of a kind used for producing masks or reticles from photoresist coated substrates | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.40.90 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Machines and apparatus specified in Note 11 (C) to this Chapter: / - - Other | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.11 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of boules or wafers: / - - - Of apparatus for rapid heating of semiconductor wafers | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.12 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of boules or wafers: / - - - Of spin dryers for semiconductor wafer processing | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.13 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of boules or wafers: / - - - Of machines for working any material by removal of material, by laser or other light or photon beam in the production of semiconductor wafers | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.14 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of boules or wafers: / - - - Of machines for sawing monocrystal semiconductor boules into slices, or wafers into chips: / - - - - Tool holders and self-opening dieheads; work holders; dividing heads and other special attachments for machine-tools | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.15 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of boules or wafers: / - - - Of machines for sawing monocrystal semiconductor boules into slices, or wafers into chips: / - - - - Other | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.16 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of boules or wafers: / - - - Of grinding, polishing and lapping machines for processing of semiconductor wafers | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.17 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of boules or wafers: / - - - Of apparatus for growing or pulling monocrystal semiconductor boules | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.19 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of boules or wafers: / - - - Other | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.21 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - - Of chemical vapour deposition apparatus for semiconductor production | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.22 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - - Of epitaxial deposition machines for semiconductor wafers; of spinners for coating photographic emulsions on semiconductor wafers | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.23 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - - Of ion implanters for doping semiconductor materials; of apparatus for physical deposition by sputtering on semiconductor wafers; of physical deposition apparatus for semiconductor production; of direct write-on-wafer apparatus, step and repeat aligners and other lithography equipment | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.24 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - - Of spraying appliances for etching, stripping or cleaning semiconductor wafers; of apparatus for wet etching, developing, stripping or cleaning semiconductor wafers; of dry etching patterns on semiconductor materials: / - - - - Tool holders and self-opening dieheads; work holders; dividing heads and other special attachments for machine-tools | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.25 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - - Of spraying appliances for etching, stripping or cleaning semiconductor wafers; of apparatus for wet etching, developing, stripping or cleaning semiconductor wafers; of dry etching patterns on semiconductor materials: / - - - - Other | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.26 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - - Of dicing machines for scribing or scoring semiconductor wafers; of lasercutters for cutting tracks in semiconductor production by laser beam; of machines for bending, folding and straightening semiconductor leads: / - - - - Tool holders and self-opening dieheads; workholders; dividing heads and other special attachments for machine-tools | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.27 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - - Of dicing machines for scribing or scoring semiconductor wafers; of lasercutters for cutting tracks in semiconductor production by laser beam; of machines for bending, folding and straightening semiconductor leads: / - - - - Other | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.28 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - - Of resistance heated furnaces and ovens for the manufacture of semiconductor devices on semiconductor wafers; of inductance or dielectric furnaces and ovens for the manufacture of semiconductor devices on semiconductor wafers | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.29 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits: / - - - Other | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.31 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of flat panel displays: / - - - Of apparatus for dry etching patterns on flat panel display substrates | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.32 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of flat panel displays: / - - - Of apparatus for wet etching, developing, stripping or cleaning flat panel displays: / - - - - Tool holders and self-opening dieheads; work holders; dividing heads and other special attachments for machine-tools | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.33 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of flat panel displays: / - - - Of apparatus for wet etching, developing, stripping or cleaning flat panel displays: / - - - - Other | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.34 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of flat panel displays: / - - - Of chemical vapour deposition apparatus for flat panel display production | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.35 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of flat panel displays: / - - - Of spinners for coating photosensitive emulsions on flat panel display substrates | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.36 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of flat panel displays: / - - - Of apparatus for physical deposition on flat panel display substrates | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.39 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines and apparatus for the manufacture of flat panel displays: / - - - Other | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.41 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines or apparatus specified in Note 11 (C) to this Chapter: / - - - Of focused ion beam milling machines to produce or repair masks and reticles for patterns on semiconductor devices | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.42 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines or apparatus specified in Note 11 (C) to this Chapter: / - - - Of die attach apparatus, tape automated bonders, wire bonders and of encapsulation equipment for assembly of semiconductors | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.43 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines or apparatus specified in Note 11 (C) to this Chapter: / - - - Of automated machines for the transport, handling and storage of semiconductor wafers, wafer cassettes, wafer boxes and other materials for semiconductor devices | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.44 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines or apparatus specified in Note 11 (C) to this Chapter: / - - - Of optical stereoscopic and photomicrographic microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.45 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines or apparatus specified in Note 11 (C) to this Chapter: / - - - Of electron beam microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.46 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines or apparatus specified in Note 11 (C) to this Chapter: / - - - Of pattern generating apparatus of a kind used for producing masks or reticles from photoresist coated substrates, including printed circuit assemblies | unit | 5% | 0% | 8 / 10 (several rates) |
| 8486.90.49 | Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories / - Parts and accessories: / - - Of machines or apparatus specified in Note 11 (C) to this Chapter: / - - - Other | unit | 5% | 0% | 8 / 10 (several rates) |